It will increase with the frequency as the impact is higher with lower wave length. This leads to an additional delay and some real and imaginary parts in addition, which you will see in the smith diagram. If one of those elements is investigated afterwards, the reference plane is still at the same point, but -for example- the open or short point of the element is a little bit off. With this information the calibration process is able to calculate out the delay and the additional impact of the inner conductor line leading to the open / short / match element. The reference file describes some parameters like e.g.
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